It looks like you are coming from United States, but the current site you have selected to visit is Singapore. Do you want to change sites?

Yes, please. No. Keep me on the current site.

Microelectronics

Ultrapure water, wastewater and reuse solutions designed to keep microelectronics production flowing

Water Bubbles Stock Image

The microelectronics industry depends on a consistent supply of ultrapure water (UPW) for critical processes, such as wafer cleaning, etching, and rinsing.  Even trace impurities can affect throughput, delay production schedules, and compromise yield—making effective water management essential to maintaining production continuity. 

Microelectronics water management encompasses the full cycle of water use in semiconductor and microelectronics manufacturing—from UPW that meets tight purity specifications, to complex wastewater streams, to water recovery and reuse. Effective water management protects yield, supports  compliance, reduces water consumption and ensures that critical water infrastructure performs consistently under changing production demands.

Key water challenges in microelectronics

  • Production continuity under pressure. A water system delay can stall start-up or halt production, costing millions per day. Infrastructure must perform consistently regardless of changing demands.
  • Growing water complexity. Stricter discharge rules, changing chemistries, emerging contaminants, and hard-to-treat streams complicate compliance, risking penalties and operational restrictions. 
  • Resource efficiency and sustainability commitments. Manufacturers are facing increased pressure to improve efficiency, reduce consumption, reduce water and meet sustainability goals. 
  • Scaling UPW capacity. As fabs increase output and geometries shrink, demand for UPW grows in volume and purity. 

How Xylem helps

We help you keep production flowing with ultrapure water, wastewater and water reuse solutions designed to support reliable operations, simplify water management, enable future growth and improve resource efficiency. 

Backed by deep industry expertise, responsive service, and operational insight, Xylem helps manufacturers reduce risk, improve performance, and confidently meet the demands of a rapidly evolving industry. By combining the strengths of Xylem and Evoqua Water Technologies in 2023, we now offer one of the industry's most comprehensive portfolios of water and wastewater solutions, helping microelectronics manufacturers manage water across the entire facility lifecycle.

FAQs for microelectronics customers

Microelectronics manufacturing requires ultrapure water that meets tight purity specifications—typically 18 megohm-centimeters of electrical resistivity at 25°C, with very low levels of total organic carbon (TOC) and particles. Wastewater streams from processes like chemical mechanical planarization (CMP) and acid washing require specialized treatment, including neutralization and metals removal, before discharge.

 

Fabs reduce consumption through a combination of UPW system optimization, DI rinse water reclaim, cooling tower management and closed-loop recycling. The IRDS has set long-term targets for fab water recycling and reclamation rates exceeding 75 percent of total water use. We help you design and implement reuse strategies that reduce freshwater withdrawal while maintaining the purity specifications production demands.

Ultrapure water (UPW) is water that has been treated to remove virtually all impurities—minerals, organics, particles and bacteria—to meet the purity requirements of semiconductor fabrication. UPW is used for wafer rinsing, chemical dilution and cleaning throughout the manufacturing process. Even trace contamination can affect yield, making consistent UPW quality and system uptime essential to production continuity.

Semiconductor fabs generate complex wastewater streams containing acids, heavy metals, CMP slurries and fluorides. These streams require specialized treatment—including acid waste neutralization, metals precipitation, fluoride removal and solids management—to meet discharge permits and avoid violations. As production scales and process chemistries change, wastewater treatment systems must adapt to handle new contaminants and volumes. 

We work alongside microelectronics manufacturers across the full water cycle—from UPW production and wastewater treatment to water reuse, digital monitoring and lifecycle service. By bringing together treatment, reuse, monitoring and service capabilities, we help fabs reduce operational risk, simplify water management, improve resource efficiency and scale with confidence as manufacturing requirements evolve.

Request More Information

Contact Xylem for more information on available solutions.